ISO - 24477
Vacuum technology — Vacuum gauges — Specifications, calibration and measurement uncertainties for spinning rotor gauges
active, Most Current
| Organization: | ISO |
| Publication Date: | 1 August 2022 |
| Status: | active |
| Page Count: | 18 |
| ICS Code (Vacuum technology): | 23.160 |
scope:
This document defines terms related to spinning rotor gauges (SRGs), specifies the necessary parameters for SRGs, details their calibration procedure and describes which measurement uncertainties to consider when operating these gauges. This document is applicable to pressure up to 2 Pa.
Document History
24477
August 1, 2022
Vacuum technology — Vacuum gauges — Specifications, calibration and measurement uncertainties for spinning rotor gauges
This document defines terms related to spinning rotor gauges (SRGs), specifies the necessary parameters for SRGs, details their calibration procedure and describes which measurement uncertainties to...