IEC - 62047-42
Semiconductor devices – Micro-electromechanical devices – Part 42: Measurement methods of electro-mechanical conversion characteristics of piezoelectric MEMS cantilever
active, Most Current
| Organization: | IEC |
| Publication Date: | 1 September 2022 |
| Status: | active |
| Page Count: | 26 |
| ICS Code (Other semiconductor devices): | 31.080.99 |
scope:
This part of IEC 62047 specifies measuring methods of electro-mechanical conversion characteristics of piezoelectric thin film on microcantilever, which is typical structure of actual micro sensors and micro actuators. In order to obtain actual and precise piezoelectric coefficient of the piezoelectric thin films with microdevice structures, and this document reports the schema to determine the characteristic parameters for consumer, industry or any other applications of piezoelectric devices. This document applies to piezoelectric thin films on microcantilever fabricated by MEMS process.
Document History
62047-42
September 1, 2022
Semiconductor devices – Micro-electromechanical devices – Part 42: Measurement methods of electro-mechanical conversion characteristics of piezoelectric MEMS cantilever
This part of IEC 62047 specifies measuring methods of electro-mechanical conversion characteristics of piezoelectric thin film on microcantilever, which is typical structure of actual micro sensors...