IEC - TS 62607-6-5
Nanomanufacturing – Key control characteristics – Part 6-5: Graphene-based materials – Contact resistance and sheet resistance: transmission line measurement
| Organization: | IEC |
| Publication Date: | 1 December 2022 |
| Status: | active |
| Page Count: | 28 |
| ICS Code (Nanotechnologies): | 07.120 |
scope:
This part of IEC TS 62607 establishes a standardized method to determine the key control characteristics
• contact resistance, and
• sheet resistance
for graphene-based materials and other two-dimensional materials by a
• transmission line measurement.
The method uses test structures applied to the 2D material by photolithographic methods consisting of several metal electrodes with increasing spacing between the electrodes. By a measurement of the voltage drop between different pairs of electrodes, sheet resistance and contact resistance can be calculated.
• The method can be applied to any other two-dimensional materials which are subject to electrical metal contact on top of the materials.
• The method provides accurate and reproducible results, if the electrical contact formed between the two-dimensional material and the metal electrodes provides ohmic contact property.
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