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DIN 50989-5

Ellipsometrie - Teil 5: Modell Mehrfachschichten und periodische Schichten; Text Deutsch und Englisch

inactive
Organization: DIN
Publication Date: 1 March 2023
Status: inactive
Page Count: 44
ICS Code (Non-destructive testing): 19.100

Document History

DIN 50989-5
December 1, 2023
Ellipsometrie - Teil 5: Modell Mehrfachschichten und periodische Schichten; Text Deutsch und Englisch
A description is not available for this item.
DIN 50989-5
March 1, 2023
Ellipsometrie - Teil 5: Modell Mehrfachschichten und periodische Schichten; Text Deutsch und Englisch
A description is not available for this item.

References

This document is referenced by:
EN ISO 23131 - Ellipsometry - Principles
Published by CEN on November 1, 2022
This document specifies a method for determining optical and dielectric constants in the UV-VIS-NIR spectral range as well as layer thicknesses in the field of at-line production control, quality...
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