BSI - BS ISO 8181
Atomic layer deposition — Vocabulary
active, Most Current
| Organization: | BSI |
| Publication Date: | 30 November 2023 |
| Status: | active |
| Page Count: | 18 |
| ICS Code (Surface treatment and coating in general): | 25.220.01 |
| ICS Code (Manufacturing engineering (Vocabularies)): | 01.040.25 |
Document History
BS ISO 8181
November 30, 2023
Atomic layer deposition — Vocabulary
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