BSI - 24/30486622 DC
Draft BS EN IEC 62047-49 Semiconductor devices - Micro-electromechanical devices Part 49: Reliability test methods of electro-mechanical conversion characteristics of piezoelectric MEMS cantilever
pending, Most Current
| Organization: | BSI |
| Publication Date: | 1 February 2024 |
| Status: | pending |
| Page Count: | 11 |
| ICS Code (Semiconductor devices): | 31.080 |
| ICS Code (Other semiconductor devices): | 31.080.99 |
Document History
24/30486622 DC
February 1, 2024
Draft BS EN IEC 62047-49 Semiconductor devices - Micro-electromechanical devices Part 49: Reliability test methods of electro-mechanical conversion characteristics of piezoelectric MEMS cantilever
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