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CEI EN 62047-2

Semiconductor devices - Micro-electromechanical devices Part 2: Tensile testing method of thin film materials

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Organization: CEI
Publication Date: 1 April 2007
Status: active
Page Count: 20
scope:

Norma recepita mediante l'annuncio su CEINFORMA aprile 2007.La presente Norma recepisce il testo originale inglese della Pubblicazione IEC e pertanto consta delle sole pagine dispari.

Document History

CEI EN 62047-2
April 1, 2007
Semiconductor devices - Micro-electromechanical devices Part 2: Tensile testing method of thin film materials
Norma recepita mediante l'annuncio su CEINFORMA aprile 2007.La presente Norma recepisce il testo originale inglese della Pubblicazione IEC e pertanto consta delle sole pagine dispari.

References

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