JSA - JIS B 9960-33
Safety of machinery - Electrical equipment of machines - Part 33: Requirements for semiconductor fabrication equipment
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| Organization: | JSA |
| Publication Date: | 21 May 2012 |
| Status: | active |
| ICS Code (Industrial robots. Manipulators): | 25.040.30 |
| ICS Code (Electrical engineering in general): | 29.020 |
| ICS Code (Safety of machinery): | 13.110 |
Document History
JIS B 9960-33
May 21, 2012
Safety of machinery - Electrical equipment of machines - Part 33: Requirements for semiconductor fabrication equipment
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