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JSA - JIS B 9960-33

Safety of machinery - Electrical equipment of machines - Part 33: Requirements for semiconductor fabrication equipment

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Organization: JSA
Publication Date: 21 May 2012
Status: active
ICS Code (Industrial robots. Manipulators): 25.040.30
ICS Code (Electrical engineering in general): 29.020
ICS Code (Safety of machinery): 13.110

Document History

JIS B 9960-33
May 21, 2012
Safety of machinery - Electrical equipment of machines - Part 33: Requirements for semiconductor fabrication equipment
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References

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