DS/EN ISO 10692-1
Gas cylinders - Gas cylinder valve connections for use in the microelectronics industry - Part 1: Outlet connections
|Publication Date:||1 November 2001|
|ICS Code (Pressure vessels):||23.020.30|
This standard applies to outlet connections of gas cylinder valves for gases and gas mixtures and concerns special requirements where the highest levels of cleanliness and freedom from particles are demanded for the manufacture of microelectronic components or similar applications.