AFNOR - NF EN 62047-12
Semiconductor devices - Micro-electromechanical devices - Part 12 : bending fatigue testing method of thin film materials using resonant vibration of MEMS structures
active, Most Current
| Organization: | AFNOR |
| Publication Date: | 1 July 2012 |
| Status: | active |
| ICS Code (Other semiconductor devices): | 31.080.99 |
Document History
NF EN 62047-12
July 1, 2012
Semiconductor devices - Micro-electromechanical devices - Part 12 : bending fatigue testing method of thin film materials using resonant vibration of MEMS structures
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