DIN EN 62047-15
Semiconductor devices - Micro-electromechanical devices - Part 15: Test method of bonding quality between PDMS and glass (IEC 47F/126/CD:2012)
inactive, Most Current
| Organization: | DIN |
| Publication Date: | 1 November 2012 |
| Status: | inactive |
| Page Count: | 19 |
| ICS Code (Electromechanical components in general): | 31.220.01 |
| ICS Code (Semiconductor devices in general): | 31.080.01 |
Document History
DIN EN 62047-15
November 1, 2012
Semiconductor devices - Micro-electromechanical devices - Part 15: Test method of bonding quality between PDMS and glass (IEC 47F/126/CD:2012)
A description is not available for this item.