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CEN - EN ISO 14644-10

Cleanrooms and associated controlled environments - Part 10: Classification of surface cleanliness by chemical concentration

active, Most Current
Organization: CEN
Publication Date: 1 March 2013
Status: active
Page Count: 40
ICS Code (Cleanrooms and associated controlled environments): 13.040.35
scope:

This part of ISO 14644 defines the classification system for cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and Particles). This part of ISO 14644 is applicable to all solid surfaces in cleanrooms and associated controlled environments such as walls, ceilings, floors, working environment, tools, equipment and devices

NOTE 1 For the purpose of this part of ISO 14644, consideration is only given to the chemical characteristics of a particle. The physical properties of the particle are not considered and this part of ISO 14644 does not cover the interaction between the contamination and the surface.

NOTE 2 This part of ISO 14644 does not include the contamination generation process and any time-dependent influences (deposition, sedimentation, ageing, etc.) or process- dependent activities such as transportation and handling. Neither does it include guidance on statistical quality control techniques to ensure compliance.

Document History

EN ISO 14644-10
March 1, 2013
Cleanrooms and associated controlled environments - Part 10: Classification of surface cleanliness by chemical concentration
This part of ISO 14644 defines the classification system for cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and...

References

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