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DS/EN ISO 14644-10

Cleanrooms and associated controlled environments – Part 10: Classification of surface cleanliness by chemical concentration

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Organization: DS
Publication Date: 22 March 2013
Status: active
Page Count: 42
ICS Code (Cleanrooms and associated controlled environments): 13.040.35
scope:

ISO 14644-10:2012 defines the classification system for cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles). It is applicable to all solid surfaces in cleanrooms and associated controlled environments such as walls, ceilings, floors, working environment, tools, equipment and devices.

Document History

May 23, 2022
Cleanrooms and associated controlled environments – Part 10: Assessment of surface cleanliness for chemical contamination (ISO 14644-10:2022)
This document establishes appropriate testing processes to determine the cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules,...
DS/EN ISO 14644-10
March 22, 2013
Cleanrooms and associated controlled environments – Part 10: Classification of surface cleanliness by chemical concentration
ISO 14644-10:2012 defines the classification system for cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and...
Cleanrooms and associated controlled environments – Part 10: Assessment of surface cleanliness for chemical contamination (ISO/FDIS 14644-10:2021)
This document establishes appropriate testing processes to determine the cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules,...
Cleanrooms and associated controlled environments - Part 10: Classification of surface cleanliness by chemical concentration (ISO/DIS 14644-10:2011)
This standard defines the classification system for cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and...
Cleanrooms and associated controlled environments - Part 10: Classification of surface cleanliness by chemical concentration (ISO/FDIS 14644-10:2012)
This part of ISO 14644 defines the classification system for cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and...
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