DSF/ISO/FDIS 25178-603
Geometrical product specifications (GPS) - Surface texture: Areal - Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments
pending, Most Current
| Organization: | DS |
| Status: | pending |
| Page Count: | 37 |
| ICS Code (Properties of surfaces): | 17.040.20 |
scope:
This part of ISO 25178 describes the metrological characteristics of a phase-shifting interferometric (PSI) profile and areal surface texture measuring microscopes.
Document History
DSF/ISO/FDIS 25178-603
Geometrical product specifications (GPS) - Surface texture: Areal - Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments
This part of ISO 25178 describes the metrological characteristics of a phase-shifting interferometric (PSI) profile and areal surface texture measuring microscopes.