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ABSTRACT

The structure and chemistry of heterophase boundaries, such as metal/metal oxide interfaces, can be resolved by dedicated techniques of transmission electron microscopy. High-resolution transmission electron microscopy (HREM) reveals the structure with high precision. The coordinates of atom columns can be detected with an accuracy of ±O.02 nm. However, only the projected structure of the interface can be revealed if (i) both crystals (adjacent to the interface) are oriented parallel to low-indexed Laue zones and (ii) the interface itself is also parallel to the incoming electron beam. Analytical electron microscopy (AEM) reveals the chemical composition of the interfaces with a spatial resolution of <1 nm (with dedicated systems). Successful HREM and AEM studies require the preparation of specimens with thicknesses < 100nm. Often specimen preparation presents a major obstacle for applying advanced transmission electron microscopy techniques in materials science and also for the microscopy of oxidation. Specimen preparation techniques have been developed which allow the preparation of high-quality cross-sectional TEM specimens.

Edited by: S.B. Newcomb, M.J. Bennett