CEN - EN ISO 25178-604
Geometrical product specifications (GPS) - Surface texture: Areal - Part 604: Nominal characteristics of non-contact (coherence scanning interferometry) instruments
active, Most Current
| Organization: | CEN |
| Publication Date: | 1 August 2013 |
| Status: | active |
| Page Count: | 52 |
| ICS Code (Properties of surfaces): | 17.040.20 |
scope:
This part of ISO 25178 specifies the metrological characteristics of coherence scanning interferometry (CSI) systems for 3D mapping of surface height.
Document History
EN ISO 25178-604
August 1, 2013
Geometrical product specifications (GPS) - Surface texture: Areal - Part 604: Nominal characteristics of non-contact (coherence scanning interferometry) instruments
This part of ISO 25178 specifies the metrological characteristics of coherence scanning interferometry (CSI) systems for 3D mapping of surface height.