CEN - EN ISO 25178-603
Geometrical product specifications (GPS) - Surface texture: Areal - Part 603: Nominal characteristics of non-contact (phaseshifting interferometric microscopy) instruments
active, Most Current
| Organization: | CEN |
| Publication Date: | 1 October 2013 |
| Status: | active |
| Page Count: | 40 |
| ICS Code (Properties of surfaces): | 17.040.20 |
scope:
This part of ISO 25178 describes the metrological characteristics of phase-shifting interferometric (PSI) profile and areal surface texture measuring microscopes.
Document History
EN ISO 25178-603
October 1, 2013
Geometrical product specifications (GPS) - Surface texture: Areal - Part 603: Nominal characteristics of non-contact (phaseshifting interferometric microscopy) instruments
This part of ISO 25178 describes the metrological characteristics of phase-shifting interferometric (PSI) profile and areal surface texture measuring microscopes.