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ASTM F1618

Standard Practice for Determination of Uniformity of Thin Films on Silicon Wafers

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Organization: ASTM
Publication Date: 10 May 2002
Status: inactive
Page Count: 7
ICS Code (Semiconducting materials): 29.045

Document History

ASTM F1618
May 10, 2002
Standard Practice for Determination of Uniformity of Thin Films on Silicon Wafers
A description is not available for this item.
June 10, 1996
Standard Practice for Determination of Uniformity of Thin Films on Silicon Wafers
1. Scope 1.1 This practice covers a set of site distribution patterns for measuring the uniformity of a property of a thin film on a silicon wafer, as well as simple procedures for analyzing and...
September 15, 1995
STANDARD PRACTICE FOR DETERMINATION OF UNIFORMITY OF THIN FILMS ON SILICON WAFERS
A description is not available for this item.
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