DIN EN 62047-1
Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions (IEC 47F/177/CD:2013)
inactive, Most Current
| Organization: | DIN |
| Publication Date: | 1 May 2014 |
| Status: | inactive |
| Page Count: | 59 |
| ICS Code (Electromechanical components in general): | 31.220.01 |
| ICS Code (Electronics (Vocabularies)): | 01.040.31 |
| ICS Code (Semiconductor devices in general): | 31.080.01 |
scope:
This part of IEC 62047 defines terms for micro-electromechani
Document History
DIN EN 62047-1
May 1, 2014
Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions (IEC 47F/177/CD:2013)
This part of IEC 62047 defines terms for micro-electromechanical devices including the process of production of such devices.