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AFNOR - NF EN 62047-18

Semiconductor devices - Micro-electromechanical devices - Part 18 : bend testing methods of thin film materials

active, Most Current
Organization: AFNOR
Publication Date: 28 February 2014
Status: active
ICS Code (Semiconducting materials): 29.045
ICS Code (Other semiconductor devices): 31.080.99

Document History

NF EN 62047-18
February 28, 2014
Semiconductor devices - Micro-electromechanical devices - Part 18 : bend testing methods of thin film materials
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