Semiconductor devices – Micro-electromechanical devices – Part 20: Gyroscopes
|Publication Date:||1 June 2014|
|ICS Code (Other semiconductor devices):||31.080.99|
This part of IEC 62047 specifies terms and definitions, ratings and characteristics, and measuring methods of gyroscopes.
Gyroscopes are primarily used for consumer, general industries and aerospace applications. MEMS and semiconductor lasers are widely used for device technology of gyroscopes.
Hereafter, gyroscope is referred to as gyro.