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ASTM F1621

STANDARD PRACTICE FOR DETERMINING THE POSITIONAL ACCURACY CAPABILITIES OF A SCANNING SURFACE INSPECTION SYSTEM

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Organization: ASTM
Publication Date: 15 September 1995
Status: inactive
Page Count: 8
ICS Code (Semiconducting materials): 29.045

Document History

February 10, 1996
Standard Practice for Determining the Positional Accuracy Capabilities of a Scanning Surface Inspection System
1. Scope 1.1 This practice covers the determination of the accuracy with which a scanning surface inspection system (SSIS) reports the positions of localized light scatterers on a silicon wafer...
ASTM F1621
September 15, 1995
STANDARD PRACTICE FOR DETERMINING THE POSITIONAL ACCURACY CAPABILITIES OF A SCANNING SURFACE INSPECTION SYSTEM
A description is not available for this item.
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