JSA - JIS R 1636
Test Method for Thickness of Fine Ceramic Thin Films - Film Thickness by Contact Probe Profilometer
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| Organization: | JSA |
| Publication Date: | 20 January 1998 |
| Status: | active |
| Page Count: | 9 |
| ICS Code (Ceramics in general): | 81.060.01 |
Document History
JIS R 1636
January 20, 1998
Test Method for Thickness of Fine Ceramic Thin Films - Film Thickness by Contact Probe Profilometer
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