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ASTM F612

STANDARD PRACTICE FOR CLEANING SURFACES OF POLISHED SILICON SLICES

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Organization: ASTM
Publication Date: 31 October 1988
Status: inactive
Page Count: 2

Document History

ASTM F612
October 31, 1988
STANDARD PRACTICE FOR CLEANING SURFACES OF POLISHED SILICON SLICES
A description is not available for this item.
November 28, 1983
STANDARD PRACTICE FOR CLEANING SURFACES OF POLISHED SILICON SLICES (R 1988)
A description is not available for this item.
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