DIN IEC 62047-4

Semiconductor devices - Micro-electromechanical devices - Part 4: Generic specification for MEMS (IEC 47/1857/CD:2006)

inactive, Most Current
Organization: DIN
Publication Date: 1 September 2006
Status: inactive
Page Count: 53
ICS Code (Electromechanical components in general): 31.220.01
ICS Code (Semiconductor devices in general): 31.080.01

Document History

DIN IEC 62047-4
September 1, 2006
Semiconductor devices - Micro-electromechanical devices - Part 4: Generic specification for MEMS (IEC 47/1857/CD:2006)
A description is not available for this item.
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