DIN IEC 62047-4
Semiconductor devices - Micro-electromechanical devices - Part 4: Generic specification for MEMS (IEC 47/1857/CD:2006)
inactive, Most Current
| Organization: | DIN |
| Publication Date: | 1 September 2006 |
| Status: | inactive |
| Page Count: | 53 |
| ICS Code (Electromechanical components in general): | 31.220.01 |
| ICS Code (Semiconductor devices in general): | 31.080.01 |
Document History
DIN IEC 62047-4
September 1, 2006
Semiconductor devices - Micro-electromechanical devices - Part 4: Generic specification for MEMS (IEC 47/1857/CD:2006)
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