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ASTM International - ASTM F127-84

Definitions of Terms Relating to Relating to Photomasking Technology for Microelectronics (Withdrawn 1992)

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Organization: ASTM International
Publication Date: 1 January 1984
Status: inactive
Page Count: 7
ICS Code (Electronics (Vocabularies)): 01.040.31
ICS Code (Integrated circuits. Microelectronics): 31.200
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