ASTM International - ASTM F143-73(1978)
Method of Test for Thickness of Epitaxial Layers of Silicon by Measurement of Stacking Fault Dimension (Withdrawn 1985)
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| Organization: | ASTM International |
| Publication Date: | 1 January 1973 |
| Status: | inactive |
Document History
ASTM F143-73(1978)
January 1, 1973
Method of Test for Thickness of Epitaxial Layers of Silicon by Measurement of Stacking Fault Dimension (Withdrawn 1985)
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