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ASTM International - ASTM F612-88

Practice for Cleaning Surfaces of Polished Silicon Slices (Withdrawn 1993)

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Organization: ASTM International
Publication Date: 1 January 1988
Status: inactive
Page Count: 2
ICS Code (Semiconducting materials): 29.045

Document History

ASTM F612-88
January 1, 1988
Practice for Cleaning Surfaces of Polished Silicon Slices (Withdrawn 1993)
A description is not available for this item.
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