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ASTM International - ASTM F1189-88

Test Method for Using Computer-Assisted Infrared Spectrophotometry to Measure the Interstitial Oxygen Content of Silicon Slices Polished on Both Sides (Withdrawn 1993)

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Organization: ASTM International
Publication Date: 1 January 1988
Status: inactive
Page Count: 4
ICS Code (Semiconducting materials): 29.045

Document History

ASTM F1189-88
January 1, 1988
Test Method for Using Computer-Assisted Infrared Spectrophotometry to Measure the Interstitial Oxygen Content of Silicon Slices Polished on Both Sides (Withdrawn 1993)
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