ASTM International - ASTM F1189-88
Test Method for Using Computer-Assisted Infrared Spectrophotometry to Measure the Interstitial Oxygen Content of Silicon Slices Polished on Both Sides (Withdrawn 1993)
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| Organization: | ASTM International |
| Publication Date: | 1 January 1988 |
| Status: | inactive |
| Page Count: | 4 |
| ICS Code (Semiconducting materials): | 29.045 |
Document History
ASTM F1189-88
January 1, 1988
Test Method for Using Computer-Assisted Infrared Spectrophotometry to Measure the Interstitial Oxygen Content of Silicon Slices Polished on Both Sides (Withdrawn 1993)
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