ASTM International - ASTM F66-84(1990)
Test Methods for Testing Photoresists Used in Microelectronic Fabrication (Withdrawn 1996)
inactive
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| Organization: | ASTM International |
| Publication Date: | 1 January 1984 |
| Status: | inactive |
| Page Count: | 9 |
| ICS Code (Paints and varnishes): | 87.040 |
Document History
ASTM F66-84(1990)
January 1, 1984
Test Methods for Testing Photoresists Used in Microelectronic Fabrication (Withdrawn 1996)
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