ASTM International - ASTM F890-84(1992)
Practice for Determining Pinhole Density in Photoresist Films Used in Microelectronic Device Processing (Withdrawn 1996)
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| Organization: | ASTM International |
| Publication Date: | 1 January 1984 |
| Status: | inactive |
| Page Count: | 3 |
Document History
ASTM F890-84(1992)
January 1, 1984
Practice for Determining Pinhole Density in Photoresist Films Used in Microelectronic Device Processing (Withdrawn 1996)
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