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ASTM International - ASTM F2074-00

Standard Guide for Measuring Diameter of Silicon and Other Semiconductor Wafers (Withdrawn 2003)

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Organization: ASTM International
Publication Date: 10 December 2000
Status: inactive
Page Count: 3
ICS Code (Semiconducting materials): 29.045
scope:

This standard was transferred to SEMI (www.semi.org) May 2003

1.1 This guide defines standardized positions for measuring diameter of circular wafers of silicon and other semiconducting materials that contain flats or notches on the periphery. It was developed for use with silicon wafers with standard diameter and flat positions as given in SEMI Specifications M1.

1.2 It may be applied to other semiconductor wafers if the flat locations are properly taken into account.

1.3 Wafers of any size can be measured provided that suitable test jigs and instruments are available.

1.4 Roundness of wafers cannot be determined from measurements made solely at the positions defined in this guide. No information is provided concerning the diameter of the wafer at points other than those measured.

Document History

ASTM F2074-00
December 10, 2000
Standard Guide for Measuring Diameter of Silicon and Other Semiconductor Wafers (Withdrawn 2003)
This standard was transferred to SEMI (www.semi.org) May 2003 1.1 This guide defines standardized positions for measuring diameter of circular wafers of silicon and other semiconducting materials...
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