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ASTM International - ASTM E1438-91(1996)

Standard Guide for Measuring Widths of Interfaces in Sputter Depth Profiling Using SIMS

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Organization: ASTM International
Publication Date: 15 September 1991
Status: inactive
Page Count: 2
scope:

1.1 This guide provides the SIMS analyst with a method for determining the width of interfaces from SIMS sputtering data obtained from analyses of layered specimens. This guide does not apply to data obtained from analyses of specimens with thin markers or specimens without interfaces such as ion-implanted specimens.

1.2 This guide does not describe methods for the optimization of interface width or the optimization of depth resolution.

1.3 This standard does not purport to address all of the safety problems, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

Document History

November 1, 2019
Standard Guide for Measuring Widths of Interfaces in Sputter Depth Profiling Using SIMS
5.1 Although it would be desirable to measure the extent of profile distortion in any unknown sample by using a standard sample and this guide, measurements of interface width (profile distortion)...
November 1, 2011
Standard Guide for Measuring Widths of Interfaces in Sputter Depth Profiling Using SIMS
Although it would be desirable to measure the extent of profile distortion in any unknown sample by using a standard sample and this guide, measurements of interface width (profile distortion) can be...
November 1, 2006
Standard Guide for Measuring Widths of Interfaces in Sputter Depth Profiling Using SIMS
Although it would be desirable to measure the extent of profile distortion in any unknown sample by using a standard sample and this guide, measurements of interface width (profile distortion) can be...
September 15, 1991
Standard Guide for Measuring Widths of Interfaces in Sputter Depth Profiling Using SIMS
1.1 This guide provides the SIMS analyst with a method for determining the width of interfaces from SIMS sputtering data obtained from analyses of layered specimens. This guide does not apply to data...
ASTM E1438-91(1996)
September 15, 1991
Standard Guide for Measuring Widths of Interfaces in Sputter Depth Profiling Using SIMS
1.1 This guide provides the SIMS analyst with a method for determining the width of interfaces from SIMS sputtering data obtained from analyses of layered specimens. This guide does not apply to data...
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