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ASTM International - ASTM F533-02a

Standard Test Method for Thickness and Thickness Variation of Silicon Wafers (Withdrawn 2003)

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Organization: ASTM International
Publication Date: 10 December 2002
Status: inactive
Page Count: 5
ICS Code (Semiconducting materials): 29.045
scope:

This standard was transferred to SEMI (www.semi.org) May 2003

1.1 This test method covers measurement of the thickness of silicon wafers, polished or unpolished, and estimation of the variation in thickness across the wafer.

1.2 This test method is intended primarily for use with wafers that meet the dimension and tolerance requirements of SEMI Specifications M1. However, it can be applied to circular silicon wafers, or substrates of any diameter and thickness that can be handled without breaking.

1.3 This test method is suitable for both contact and contactless gaging equipment. Precision statements have been established for each.

1.4 The values stated in inch-pound units are to be regarded as standard. The values in parentheses are for information only.

1.5 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

Document History

ASTM F533-02a
December 10, 2002
Standard Test Method for Thickness and Thickness Variation of Silicon Wafers (Withdrawn 2003)
This standard was transferred to SEMI (www.semi.org) May 2003 1.1 This test method covers measurement of the thickness of silicon wafers, polished or unpolished, and estimation of the variation in...
January 10, 2002
Standard Test Method for Thickness and Thickness Variation of Silicon Wafers
1.1 This test method covers measurement of the thickness of silicon wafers, polished or unpolished, and estimation of the variation in thickness across the wafer. 1.2 This test method is intended...
January 10, 2002
Standard Test Method for Thickness and Thickness Variation of Silicon Wafers
1.1 This test method covers measurement of the thickness of silicon wafers, polished or unpolished, and estimation of the variation in thickness across the wafer. 1.2 This test method is intended...
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