ASTM International - ASTM F1725-02
Standard Guide for Analysis of Crystallographic Perfection of Silicon Ingots (Withdrawn 2003)
|Publication Date:||10 December 2002|
|ICS Code (Semiconducting materials):||29.045|
This standard was transferred to SEMI (www.semi.org) May 2003
1.1 This practice covers the analysis of the crystallographic perfection in silicon ingots. The steps described are sample preparation, etching solution selection and use, defect identification, and defect counting.
1.2 This practice is suitable for use if evaluating silicon grown in either  or  direction and doped either p or n type with resistivity greater than 0.005 Ωcm.
1.3 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.