UNLIMITED FREE ACCESS TO THE WORLD'S BEST IDEAS

SUBMIT
Already an Engineering360 user? Log in.

This is embarrasing...

An error occurred while processing the form. Please try again in a few minutes.

Customize Your Engineering360 Experience

Finish!
Privacy Policy

This is embarrasing...

An error occurred while processing the form. Please try again in a few minutes.

ASTM International - ASTM F1725-02

Standard Guide for Analysis of Crystallographic Perfection of Silicon Ingots (Withdrawn 2003)

inactive
Buy Now
Organization: ASTM International
Publication Date: 10 December 2002
Status: inactive
Page Count: 3
ICS Code (Semiconducting materials): 29.045
scope:

This standard was transferred to SEMI (www.semi.org) May 2003

1.1 This practice covers the analysis of the crystallographic perfection in silicon ingots. The steps described are sample preparation, etching solution selection and use, defect identification, and defect counting.

1.2 This practice is suitable for use if evaluating silicon grown in either [111] or [100] direction and doped either p or n type with resistivity greater than 0.005 Ωcm.

1.3 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

Document History

ASTM F1725-02
December 10, 2002
Standard Guide for Analysis of Crystallographic Perfection of Silicon Ingots (Withdrawn 2003)
This standard was transferred to SEMI (www.semi.org) May 2003 1.1 This practice covers the analysis of the crystallographic perfection in silicon ingots. The steps described are sample preparation,...
June 10, 1997
Standard Guide for Analysis of Crystallographic Perfection of Silicon Ingots
1.1 This practice covers the analysis of the crystallographic perfection in silicon ingots. The steps described are sample preparations, etching solution selection and use, defect identification, and...
Advertisement