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ASTM International - ASTM E673-03

Standard Terminology Relating to Surface Analysis (Withdrawn 2012)

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Organization: ASTM International
Publication Date: 1 December 2003
Status: inactive
Page Count: 10
ICS Code (Metrology and measurement. Physical phenomena (Vocabularies)): 01.040.17
ICS Code (Properties of surfaces): 17.040.20
scope:

1.1 This terminology is related to the various disciplines involved in surface analysis.

1.2 The definitions listed apply to (a) Auger electron spectroscopy (AES), (b) X-ray photoelectron spectroscopy (XPS), (c) ion-scattering spectroscopy (ISS), (d) secondary ion mass spectrometry (SIMS), and (e) energetic ion analysis (EIA).

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