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ASTM F673

STANDARD TEST METHOD FOR MEASURING RESISTIVITY OF SEMICONDUCTOR SLICES WITH A NONCONTACT EDDY- CURRENT GAGE

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Organization: ASTM
Publication Date: 31 October 1986
Status: inactive
Page Count: 7
ICS Code (Semiconducting materials): 29.045

Document History

December 10, 2002
Standard Test Methods for Measuring Resistivity of Semiconductor Slices or Sheet Resistance of Semiconductor Films with a Noncontact Eddy-Current Gage
These test methods cover the nondestructive measurement of bulk resistivity of silicon and certain gallium-arsenide slices and of the sheet resistance of thin films of silicon or gallium-arsenide...
January 1, 1990
Standard Test Methods for Measuring Resistivity of Semiconductor Slices or Sheet Resistance of Semiconductor Films with a Noncontact Eddy-Current Gage
1. Scope 1.1 These test methods cover the nondestructive measurement of bulk resistivity of silicon and certain gallium-arsenide slices and of the sheet resistance of thin films of silicon or...
August 25, 1989
STANDARD TEST METHOD FOR MEASURING RESISTIVITY OF SEMICONDUCTOR SLICES OR SHEET RESISTANCE OF SEMICONDUCTOR FILMS WITH A NONCONTACT EDDY-CURRENT GAGE
A description is not available for this item.
August 28, 1987
STANDARD TEST METHOD FOR MEASURING RESISTIVITY OF SEMICONDUCTOR SLICES OR SHEET RESISTANCE OF SEMICONDUCTOR FILMS WITH A NONCONTACT EDDY-CURRENT GAGE
A description is not available for this item.
ASTM F673
October 31, 1986
STANDARD TEST METHOD FOR MEASURING RESISTIVITY OF SEMICONDUCTOR SLICES WITH A NONCONTACT EDDY- CURRENT GAGE
A description is not available for this item.
July 3, 1980
STANDARD METHOD FOR MEASURING RESISTIVITY OF SEMICONDUCTOR SLICES WITH A NONCONTACT EDDY- CURRENT GAGE
A description is not available for this item.
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