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ASTM International - ASTM E1577-04

Standard Guide for Reporting of Ion Beam Parameters Used in Surface Analysis

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Organization: ASTM International
Publication Date: 1 November 2004
Status: inactive
Page Count: 3
ICS Code (Properties of surfaces): 17.040.20
significance And Use:

Ion beams are utilized in surface analysis in two ways. First, they can generate signals from the specimen, for example, in SIMS and ISS. Second, they can remove material from the specimen surface... View More

scope:

1.1 This guide covers the information needed to characterize ion beams used in surface analysis.

1.2 This guide does not cover all information required to perform a sputter depth profile (see referenced documents), specify any properties of the specimen except its surface normal, and discuss the rationale for choosing a particular set of ion beam parameters (1,7). This guide does assume that the ion flux has a unique direction, that is, is an ion beam, rather than a wide spectrum of velocity vectors more typical of a plasma.

1.3 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

Document History

May 1, 2011
Standard Guide for Reporting of Ion Beam Parameters Used in Surface Analysis (Withdrawn 2020)
1.1 This guide covers the information needed to characterize ion beams used in surface analysis. 1.2 This guide does not cover all information required to perform a sputter depth profile (see...
ASTM E1577-04
November 1, 2004
Standard Guide for Reporting of Ion Beam Parameters Used in Surface Analysis
1.1 This guide covers the information needed to characterize ion beams used in surface analysis. 1.2 This guide does not cover all information required to perform a sputter depth profile (see...
April 10, 2000
Standard Guide for Reporting of Ion Beam Parameters Used in Surface Analysis
1.1 This guide covers the information needed to characterize ion beams used in surface analysis. 1.2 This guide does not cover all information required to perform a sputter depth profile (see...
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