ASTM International - ASTM E2245-05
Standard Test Method for Residual Strain Measurements of Thin, Reflecting Films Using an Optical Interferometer
|Publication Date:||1 November 2005|
|ICS Code (Photographic paper, films and plates. Cartridges):||37.040.20|
significance And Use:
Residual strain measurements are an aid in the design and fabrication of MEMS devices. The value for residual strain is used in Young'modulus calculations.
1.1 This test method covers a procedure for measuring the compressive residual strain in thin films. It applies only to films, such as found in microelectromechanic
1.2 This test method uses a non-contact optical interferometer with the capability of obtaining topographical 3-D data sets. It is performed in the laboratory.
1.3 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.