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ASTM International - ASTM F1593-08

Standard Test Method for Trace Metallic Impurities in Electronic Grade Aluminum by High Mass-Resolution Glow-Discharge Mass Spectrometer

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Organization: ASTM International
Publication Date: 15 June 2008
Status: inactive
Page Count: 7
ICS Code (Other methods of testing of metals): 77.040.99
significance And Use:

This test method is intended for application in the semiconductor industry for evaluating the purity of materials (for example, sputtering targets, evaporation sources) used in thin film... View More

scope:

1.1 This test method covers measuring the concentrations of trace metallic impurities in high purity aluminum.

1.2 This test method pertains to analysis by magnetic-sector glow discharge mass spectrometer (GDMS).

1.3 The aluminum matrix must be 99.9 weight % (3N-grade) pure, or purer, with respect to metallic impurities. There must be no major alloy constituent, for example, silicon or copper, greater than 1000 weight ppm in concentration.

1.4 This test method does not include all the information needed to complete GDMS analyses. Sophisticated computer-controlled laboratory equipment skillfully used by an experienced operator is required to achieve the required sensitivity. This test method does cover the particular factors (for example, specimen preparation, setting of relative sensitivity factors, determination of sensitivity limits, etc.) known by the responsible technical committee to affect the reliability of high purity aluminum analyses.

1.5 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

Document History

May 1, 2016
Standard Test Method for Trace Metallic Impurities in Electronic Grade Aluminum by High Mass-Resolution Glow-Discharge Mass Spectrometer
1.1 This test method covers measuring the concentrations of trace metallic impurities in high purity aluminum. 1.2 This test method pertains to analysis by magnetic-sector glow discharge mass...
ASTM F1593-08
June 15, 2008
Standard Test Method for Trace Metallic Impurities in Electronic Grade Aluminum by High Mass-Resolution Glow-Discharge Mass Spectrometer
1.1 This test method covers measuring the concentrations of trace metallic impurities in high purity aluminum. 1.2 This test method pertains to analysis by magnetic-sector glow discharge mass...
December 10, 2002
Standard Test Method for Trace Metallic Impurities in Electronic Grade Aluminum by High Mass-Resolution Glow-Discharge Mass Spectrometer
This test method is intended for application in the semiconductor industry for evaluating the purity of materials (for example, sputtering targets, evaporation sources) used in thin film...
June 10, 1997
Standard Test Method for Trace Metallic Impurities in Electronic Grade Aluminum by High Mass-Resolution Glow-Discharge Mass Spectrometer
1.1 This test method covers measuring the concentrations of trace metallic impurities in high purity aluminum. 1.2 This test method pertains to analysis by magnetic-sector glow discharge mass...
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