ASTM International - ASTM E673-01
Standard Terminology Relating to Surface Analysis
inactive
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| Organization: | ASTM International |
| Publication Date: | 10 November 2001 |
| Status: | inactive |
| Page Count: | 10 |
| ICS Code (Metrology and measurement. Physical phenomena (Vocabularies)): | 01.040.17 |
| ICS Code (Properties of surfaces): | 17.040.20 |
scope:
1.1 This terminology is related to the various disciplines involved in surface analysis.
1.2 The definitions listed apply to (a) Auger electron spectroscopy (AES), (b) X-ray photoelectron spectroscopy (XPS), (c) ion-scattering spectroscopy (ISS), (d) secondary ion mass spectrometry (SIMS), and (e) energetic ion analysis (EIA).
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