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ASTM International - ASTM E986-97

Standard Practice for Scanning Electron Microscope Beam Size Characterization

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Organization: ASTM International
Publication Date: 10 October 1997
Status: inactive
Page Count: 3
ICS Code (Electronic display devices): 31.120
ICS Code (Optical equipment): 37.020
scope:

1.1 This practice provides a reproducible means by which the performance of a scanning electron microscope (SEM) may be characterized. This performance is a measure of the SEM-operator-material combination and is quantified through the measurement of an effective "apparent edge sharpness" for a number of materials, two of which are suggested. This practice requires an SEM with the capability to perform line-scan traces (for example, -deflection waveform generation) for the suggested materials. The range of SEM magnification at which this practice is of utility is from 1000 to 200 000 X.

1.2 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

Document History

June 1, 2017
Standard Practice for Scanning Electron Microscope Beam Size Characterization
1.1 This practice provides a reproducible means by which one aspect of the performance of a scanning electron microscope (SEM) may be characterized. The resolution of an SEM depends on many factors,...
April 1, 2010
Standard Practice for Scanning Electron Microscope Beam Size Characterization
1.1 This practice provides a reproducible means by which one aspect of the performance of a scanning electron microscope (SEM) may be characterized. The resolution of an SEM depends on many factors,...
July 1, 2004
Standard Practice for Scanning Electron Microscope Beam Size Characterization
1.1 This practice provides a reproducible means by which one aspect of the performance of a scanning electron microscope (SEM) may be characterized. The resolution of an SEM depends on many factors,...
ASTM E986-97
October 10, 1997
Standard Practice for Scanning Electron Microscope Beam Size Characterization
1.1 This practice provides a reproducible means by which the performance of a scanning electron microscope (SEM) may be characterized. This performance is a measure of the SEM-operator-material...
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