ASTM International - ASTM E986-97
Standard Practice for Scanning Electron Microscope Beam Size Characterization
|Publication Date:||10 October 1997|
|ICS Code (Electronic display devices):||31.120|
|ICS Code (Optical equipment):||37.020|
1.1 This practice provides a reproducible means by which the performance of a scanning electron microscope (SEM) may be characterized. This performance is a measure of the SEM-operator-materia
1.2 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.