UNLIMITED FREE ACCESS TO THE WORLD'S BEST IDEAS

close
Already an Engineering360 user? Log in.

This is embarrasing...

An error occurred while processing the form. Please try again in a few minutes.

Customize Your Engineering360 Experience

close
Privacy Policy

This is embarrasing...

An error occurred while processing the form. Please try again in a few minutes.

ASTM International - ASTM D5127-12

Standard Guide for Ultra-Pure Water Used in the Electronics and Semiconductor Industries

inactive
Buy Now
Organization: ASTM International
Publication Date: 15 June 2012
Status: inactive
Page Count: 6
ICS Code (Water for industrial use): 13.060.25
ICS Code (Other products of the chemical industry): 71.100.99
significance And Use:

This guide recommends the water quality required for the electronics and microelectronics industries. High-purity water is required to prevent contamination of products during manufacture, since... View More

scope:

1.1 This guide provides recommendations for water quality related to electronics and semiconductor-industry manufacturing. Seven classifications of water are described, including water for line widths as low as 0.032 micron. In all cases, the recommendations are for water at the point of distribution (POD).

1.2 Water is used for washing and rinsing of semiconductor components during manufacture. Water is also used for cleaning and etching operations, making steam for oxidation of silicon surfaces, preparing photomasks, and depositing luminescent materials. Other applications are in the development and fabrication of solid-state devices, thin-film devices, communication lasers, light-emitting diodes, photo-detectors, printed circuits, memory devices, vacuum-tube devices, or electrolytic devices.

1.3 Users needing water qualities different from those described here should consult other water standards, such as Specification D1193 and Guide D5196.

1.4 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

Document History

October 15, 2018
Standard Guide for Ultra-Pure Water Used in the Electronics and Semiconductor Industries
4.1 This guide recommends the water quality required for the electronics and microelectronics industries. High-purity water is required to prevent contamination of products during manufacture, since...
January 1, 2013
Standard Guide for Ultra-Pure Water Used in the Electronics and Semiconductor Industries
4.1 This guide recommends the water quality required for the electronics and microelectronics industries. High-purity water is required to prevent contamination of products during manufacture, since...
ASTM D5127-12
June 15, 2012
Standard Guide for Ultra-Pure Water Used in the Electronics and Semiconductor Industries
This guide recommends the water quality required for the electronics and microelectronics industries. High-purity water is required to prevent contamination of products during manufacture, since...
April 15, 2007
Standard Guide for Ultra-Pure Water Used in the Electronics and Semiconductor Industries
1.1 This guide provides recommendations for water quality related to electronics and semiconductor-industry manufacturing. Six classifications of water are described, including water for line widths...
June 10, 1999
Standard Guide for Ultra Pure Water Used in the Electronics and Semiconductor Industry
1.1 This guide covers the recommendations for the purity of water suitable for use in the electronics and microelectronics industry for purposes such as the washing and rinsing of semiconductor...
Advertisement