ASTM International - ASTM F522-94
Test Method for Stacking Fault Density of Epitaxial Layers of Silicon by Interference-Contrast Microscopy (Withdrawn 1998)
inactive
Buy Now
| Organization: | ASTM International |
| Publication Date: | 1 January 1994 |
| Status: | inactive |
| Page Count: | 4 |
| ICS Code (Semiconducting materials): | 29.045 |
Document History
ASTM F522-94
January 1, 1994
Test Method for Stacking Fault Density of Epitaxial Layers of Silicon by Interference-Contrast Microscopy (Withdrawn 1998)
A description is not available for this item.