ASTM International - ASTM D7980-15
Standard Guide for Ion-Chromatographic Analysis of Anions in Grab Samples of Ultrapure Water (UPW) in the Semiconductor Industry
|Publication Date:||15 February 2015|
|ICS Code (Inorganic chemicals in general):||71.060.01|
significance And Use:
4.1 This guide is intended to help analysts in the semiconductor industry. Examples of the usefulness of anion monitoring include: (1) determining when ion-exchange resin beds (in... View More
4.1 This guide is intended to help analysts in the semiconductor industry. Examples of the usefulness of anion monitoring include: (1) determining when ion-exchange resin beds (in water-purification systems) need to be regenerated, and (2) ensuring that anion levels are low enough to allow the water to be used for the manufacture of semiconductor devices.
4.2 To ensure that the anions are indeed at low-ppt levels, it is recommended to check the conductivity of a subsample before proceeding with Section 5 of this guide. This check does not need to be exact; its purpose is simply to let the analyst know if the conductivity is higher than that of the highest-level standard solution being tested. Any high reading signifies that the sample, if analyzed, might contaminate the instrument.View Less
1.1 This guide applies to ultrapure water that is thought to contain low ppt (parts-per-trillion,
1.2 This guide is intended to help analysts avoid contamination of ultrapure-water samples, since contamination control is the primary challenge when quantifying ppt-level anions in grab samples.
1.3 This guide does not include recommendations for collecting samples from the water source.
1.4 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.