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ASTM International - ASTM D7980-15

Standard Guide for Ion-Chromatographic Analysis of Anions in Grab Samples of Ultrapure Water (UPW) in the Semiconductor Industry

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Organization: ASTM International
Publication Date: 15 February 2015
Status: active
Page Count: 3
ICS Code (Inorganic chemicals in general): 71.060.01
significance And Use:

4.1 This guide is intended to help analysts in the semiconductor industry. Examples of the usefulness of anion monitoring include: (1) determining when ion-exchange resin beds (in... View More

scope:

1.1 This guide applies to ultrapure water that is thought to contain low ppt (parts-per-trillion, weight/weight) levels of anionic contaminants (for example, bromide, chloride, fluoride, nitrate, nitrite, phosphate, and sulfate). To minimize carry-over problems between analyses, it is best to limit the concentration of any one contaminant to approximately 200 ppt (although this limit is only an approximation and may vary, depending on the user's application).

1.2 This guide is intended to help analysts avoid contamination of ultrapure-water samples, since contamination control is the primary challenge when quantifying ppt-level anions in grab samples.

1.3 This guide does not include recommendations for collecting samples from the water source.

1.4 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

Document History

ASTM D7980-15
February 15, 2015
Standard Guide for Ion-Chromatographic Analysis of Anions in Grab Samples of Ultrapure Water (UPW) in the Semiconductor Industry
1.1 This guide applies to ultrapure water that is thought to contain low ppt (parts-per-trillion, weight/weight) levels of anionic contaminants (for example, bromide, chloride, fluoride, nitrate,...
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