scope:

This standard was transferred to SEMI (www.semi.org) May 2003

1.1 This test method covers the measurement of the effective surface roughness of an opaque reflecting surface as determined by the total integrated light scattering (TIS).

1.2 Applications:

1.2.1 This test method is particularly applicable to metal mirrors or smooth dielectrics covered with an opaque reflecting surface.

1.2.2 This test method is applicable to specimens ranging in size from 5 mm in diameter to as large as the supporting components will accommodate. The sampling area is approximately 1 mm in diameter.

1.3 Limitations -This test method is limited to specimens with optical surfaces that are flat or that are spherical with a radius of curvature greater than 10 m.

1.4 This test method determines the integrated scattering from an angle approximately 2.5° from the surface normal to an angle approximately 70° from the surface normal.

1.5 The test method is performed with a helium-neon laser operating at the wavelength 632.8 nm.

1.6 Repeated use of this test method on different areas of the specimen permits mapping of the surface TIS.

1.7 This test method is nondestructive.

1.8 The maintenance of a control chart to monitor the stability of the measurement process is discussed in Annex A1.

1.9 This standard may involve hazardous materials, operations, and equipment. This standard does not purport to address all of the safety problems associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use. For specific hazard statements see Section 8.