Standard Test Method for Effective Pumping Speed of Vacuum Chamber Systems
|Publication Date:||29 September 1972|
1.1 This test method covers the measurement of effective pumping speed of complete vacuum-chamber systems. The test method is suitable for all types of vacuum systems operating at pressures below 1 × 10−4 torr and for chambers larger than approximately 10 ft3 (0.3 m3).
1.2 The values stated in inch-pound units are to be regarded as the standard.
1.3 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.