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ASTM F1189

STANDARD TEST METHOD FOR USING COMPUTER-ASSISTED INFRARED SPECTROPHOTOMETRY TO MEASURE THE INTERSTITIAL OXYGEN CONTENT OF SILICON SLICES POLISHED ON BOTH SIDES

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Organization: ASTM
Publication Date: 31 October 1988
Status: inactive
Page Count: 4

Document History

ASTM F1189
October 31, 1988
STANDARD TEST METHOD FOR USING COMPUTER-ASSISTED INFRARED SPECTROPHOTOMETRY TO MEASURE THE INTERSTITIAL OXYGEN CONTENT OF SILICON SLICES POLISHED ON BOTH SIDES
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