ASTM F388
STANDARD METHOD FOR MEASUREMENT OF OXIDE THICKNESS ON SILICON WAFERS AND METALLIZATION THICKNESS BY MULTIPLE- BEAM INTERFERENCE (TOLANSKY METHOD)
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| Organization: | ASTM |
| Publication Date: | 27 January 1984 |
| Status: | inactive |
| Page Count: | 6 |
Document History
ASTM F388
January 27, 1984
STANDARD METHOD FOR MEASUREMENT OF OXIDE THICKNESS ON SILICON WAFERS AND METALLIZATION THICKNESS BY MULTIPLE- BEAM INTERFERENCE (TOLANSKY METHOD)
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