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ASTM F388

STANDARD METHOD FOR MEASUREMENT OF OXIDE THICKNESS ON SILICON WAFERS AND METALLIZATION THICKNESS BY MULTIPLE- BEAM INTERFERENCE (TOLANSKY METHOD)

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Organization: ASTM
Publication Date: 27 January 1984
Status: inactive
Page Count: 6

Document History

ASTM F388
January 27, 1984
STANDARD METHOD FOR MEASUREMENT OF OXIDE THICKNESS ON SILICON WAFERS AND METALLIZATION THICKNESS BY MULTIPLE- BEAM INTERFERENCE (TOLANSKY METHOD)
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