DIN 50450-4
Testing of materials for semiconductor technology; determination of impurities in carrier gases and dopant gases; determination of C1-C3-hydrocarbons in nitrogen by gas-chromatography
active, Most Current
| Organization: | DIN |
| Publication Date: | 1 September 1993 |
| Status: | active |
| Page Count: | 2 |
| ICS Code (Semiconducting materials): | 29.045 |
| ICS Code (Gases for industrial application): | 71.100.20 |
Document History
DIN 50450-4
September 1, 1993
Testing of materials for semiconductor technology; determination of impurities in carrier gases and dopant gases; determination of C1-C3-hydrocarbons in nitrogen by gas-chromatography
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